Collect. Czech. Chem. Commun.
1990, 55, 2432-2440
https://doi.org/10.1135/cccc19902432
Qualitative analysis of the vapour-phase equilibrium composition in the systems Si-Cl and Si-Cl-H by matrix-isolation IR spectroscopy
Jindřich Leitnera, Jan Mikuleca and Čestmír Černýb
a Department of Materials for Electronics, Prague Institute of Chemical Technology, 166 28 Prague 6
b Department of Physical Chemistry, Prague Institute of Chemical Technology, 166 28 Prague 6
Abstract
The vapour phase in the systems Si-Cl and Si-Cl-H in equilibrium with solid silicon has been analyzed quantitatively by matrix-isolation IR spectroscopy. At 1 300 K, the analysis revealed SiCl4, SiCl3 and SiCl2 in the system Si-Cl, and HCl, SiCl4, SiCl3, SiCl2, SiHCl3 and SiH2Cl2 in the system Si-Cl-H. No SiHCl, a compound which according to equilibrium calculations represents one of the dominant components, could be detected.
