Collect. Czech. Chem. Commun.
1989, 54, 2896-2909
https://doi.org/10.1135/cccc19892896
Theoretical and experimental study of chemical equilibrium in the systems Si-Cl and Si-Cl-H. Calculation of chemical equilibrium in the systems Si-Cl and Si-Cl-H
Jindřich Leitnera, Čestmír Černýb, Petr Voňkab and Jan Mikuleca
a Department of Chemical Technology of Electronics Materials, Prague Institute of Chemical Technology, 166 28 Prague 6
b Department of Physical Chemistry, Prague Institute of Chemical Technology, 166 28 Prague 6
Crossref Cited-by Linking
- Saito Nagahiro, Ishizaki Takahiro, Fuwa Akio: Kinetics of SiHCl3 and SiCl4 Evolution in Si(s)–HCl(g) System Simulated by Ab-initio MO. Mater. Trans., JIM 2000, 41, 383. <https://doi.org/10.2320/matertrans1989.41.383>
- Voňka Petr, Leitner Jindřich: Calculation of chemical equilibria in heterogeneous multicomponent systems. Calphad J 1995, 19, 25. <https://doi.org/10.1016/0364-5916(95)00004-X>
