Collect. Czech. Chem. Commun. 1986, 51, 1-16

A quantitative model of epitaxial layers growth from the gas phase with a simultaneous participation of diffusion, adsorption, and chemical reaction

Emerich Erdösa, Jiří Laitnerb, Josef Stejskalc and Přemysl Klímac

a The Heyrovský Institute of Physical Chemistry and Electrochemistry, Czechoslovak Academy of Sciences, 121 38 Prague 2
b Department of Physical Chemistry, Prague Institute of Chemical Technology, 166 28 Prague 6
c Tesla-Popov Research Institute of Radiocommunication, 142 21 Prague 4

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